Contact Time Study of Electrostatically Actuated Microsystems


1 Department of Electrical Engineering,Sharif University of Technology

2 Department of Mechanical Engineering,Sharif University of Technology


This paper presents a model to analyze contact phenomenon in microsystems actuated by
ramp voltages, which has applications in frequency sweeping. First-order shear deformation theory is
used to model dynamical system using nite element method, while nite di erence method is applied to
model squeeze lm damping. The model is validated by static pull-in results. The presented hybrid FEMFDM
model is utilized to compute values of contact time and dynamic behavior. Considering this model,
e ects of di erent geometrical and mechanical parameters on contact time are studied. The in
uence of
imposing the additional reverse voltage on dynamic characteristics of the system is also investigated. It is
shown that magnitude and position of applying the reverse voltage is very important in preventing pull-in