Si/Si, Si/SiO2 and SiO2/SiO2 Fusion Wafer Bonding

Author

Department of Electrical Engineering,Sharif University of Technology


Volume 10, Issue 4 - Serial Number 4
Transactions on Computer Science & Engineering and Electrical Engineering (D)
January 2003
  • Receive Date: 09 May 2007
  • Revise Date: 22 December 2024
  • Accept Date: 30 December 2003