Scientia Iranica

Scientia Iranica

Si/Si, Si/SiO2 and SiO2/SiO2 Fusion Wafer Bonding

Author
Department of Electrical Engineering,Sharif University of Technology

Volume 10, Issue 4 - Serial Number 4
Transactions on Computer Science & Engineering and Electrical Engineering (D)
January 2003

  • Receive Date 09 May 2007
  • Accept Date 30 December 2003