Scientia Iranica

Keywords = 3-D structures

Number of Articles: 1

Realization of Three-Dimensional Micro and Nano-Structures on Silicon Substrates

Volume 17, Issue 2, April 2010

Soheil Azimi, Alborz Amini, Shamsoddin Mohajerzadeh, Amin Vali, Mahdiyeh Mehran

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