Author
Department of Electrical Engineering,Sharif University of Technology
Rashidian, B. (1998). Adding Electron Beam Lithography (EBL) Capability to a Scanning Electron Microscope (SEM). Scientia Iranica, 5(1), -.
B. Rashidian. "Adding Electron Beam Lithography (EBL) Capability to a Scanning Electron Microscope (SEM)". Scientia Iranica, 5, 1, 1998, -.
Rashidian, B. (1998). 'Adding Electron Beam Lithography (EBL) Capability to a Scanning Electron Microscope (SEM)', Scientia Iranica, 5(1), pp. -.
Rashidian, B. Adding Electron Beam Lithography (EBL) Capability to a Scanning Electron Microscope (SEM). Scientia Iranica, 1998; 5(1): -.
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