Scientia Iranica

Scientia Iranica

Adding Electron Beam Lithography (EBL) Capability to a Scanning Electron Microscope (SEM)

Author
Department of Electrical Engineering,Sharif University of Technology

Volume 5, Issue 1 - Serial Number 1
Transactions on Computer Science & Engineering and Electrical Engineering (D)
January 1998

  • Receive Date 10 October 2007
  • Accept Date 30 June 1998