Research Laboratory of Nanoporous Materials, Faculty of Chemistry, Iran University of Science and Technology, Tehran, P.O. Box 16846-13114, Iran.
Research Laboratory of Advanced Materials, Chemistry and Chemical Engineering Research Center of Iran, Tehran, P.O. Box 14335-186, Iran.
LiCl-doped mesoporous silica MCM-48 with cubic mesostructure, using a dierent doping concentration of LiCl, has been prepared. The LiCl-MCM-48 type materials were characterized employing XRD, FT-IR, SEM, and nitrogen adsorptiondesorption isotherm. We had the humidity sensors on a ceramic substrate with two Ag-Pd interdigital electrodes with ve ngers. The sample with 15 wt% LiCl-doped MCM-48 shows an excellent linearity in the whole humidity range of 11%-97%. It has very good response and recovery time, about 22 and 30 sec, respectively.