TY - JOUR ID - 3872 TI - Numerical study of material properties, residual stress and crack development in sintered silver nano-layers on silicon substrate JO - Scientia Iranica JA - SCI LA - en SN - 1026-3098 AU - Keikhaie, M. AU - Movahhedy, M.R. AU - Akbari, J. AU - Alemohammad, H. AD - Center of Excellence in Design, Robotics and Automation, Department of Mechanical Engineering, Sharif University of Technology, Tehran, P.O. Box 14588-89694, Iran. AD - Department of Mechanical and Mechatronics Engineering, University of Waterloo, 200 University Ave West, Waterloo, Ontario, N2L 3G1, Canada Y1 - 2016 PY - 2016 VL - 23 IS - 3 SP - 1037 EP - 1047 KW - Thin lm KW - Silver nanoparticles KW - Nanoscale sintering KW - Residual stress DO - 10.24200/sci.2016.3872 N2 - In order to improve the performance of thin lm devices, it is necessary to characterize their mechanical, as well as electrical, properties. In this work, a model is developed for analysis of the mechanical and electrical properties and the prediction of residual stresses in thin lms of silver nanoparticles deposited on silicon substrates. The model is based on inter-particle di usion modeling and nite element analysis. Through simulation of the sintering process, it is shown how the geometry, density, and electrical resistance of the thin lm layers are changed by sintering conditions. The model is also used to approximate the values of Young's modulus and the generated residual stresses in the thin lm in the absence and presence of cracks in the lm. The results are validated through comparing them with available experimental data. UR - https://scientiairanica.sharif.edu/article_3872.html L1 - https://scientiairanica.sharif.edu/article_3872_48afe7c1544f64857d53d678e73683de.pdf ER -