%0 Journal Article %T Thermally induced vibration of an electro-statically deflected functionally graded micro-beam considering thermo-elastic coupling effect %J Scientia Iranica %I Sharif University of Technology %Z 1026-3098 %A Jafarsadeghi-pournaki, Ilgar %A Rezazadeh, Ghader %A Zamanzadeh, Mohammadreza %A Shabani, Rasool %D 2014 %\ 06/01/2014 %V 21 %N 3 %P 647-662 %! Thermally induced vibration of an electro-statically deflected functionally graded micro-beam considering thermo-elastic coupling effect %K Thermally induced vibration %K FGM %K thermo-elastic coupling %K electrostatic load %R %X This study investigates the dynamic response of an electrostatically deflected capacitive cantilever functionally graded (FG) micro-beam subjected to a harmonically varying thermal load, which is incited vibration due to different material properties of the beam constituents and thermo-elastic coupling effect. The FG beam is made of mixture of metal and ceramic where the material properties vary continuously through the thickness according to an exponential distribution law (E-FGM).Assuming the Euler-Bernoulli beam theory and the infinite speed of heat transportation, the equation of motion and the conventional coupled energy equation are derived. Applying Galerkin formulation and then using Rung-kutta method as an efficient numerical tool,these equations are simultaneously solved. Changing the ceramic constituent percentage of the bottom surface, five different types of FGM micro-beams are investigated and results are presented for all types.Numerical results are shown the response of a cantilever FG micro-beam subjected to a harmonically varying temperature input. Moreover, the influences of the beam ceramic constituent percentage on the stability, vibrational behavior and natural frequency are presented. %U https://scientiairanica.sharif.edu/article_3503_d1913acbabcf6cf760b21b37240ce248.pdf