@article { author = {Rashidian, B.}, title = {Adding Electron Beam Lithography (EBL) Capability to a Scanning Electron Microscope (SEM)}, journal = {Scientia Iranica}, volume = {5}, number = {1}, pages = {-}, year = {1998}, publisher = {Sharif University of Technology}, issn = {1026-3098}, eissn = {2345-3605}, doi = {}, abstract = {}, keywords = {}, url = {https://scientiairanica.sharif.edu/article_2870.html}, eprint = {} }